Description
Micro-opto-electro-mechanics (MOEM) combines microelectronics, microoptics and micromechanics in the development of MEM devices with optical features, such as optical switches, optical cross-connects, and microbolometers.
Micro-opto-electro-mechanics (MOEM) combines microelectronics, microoptics and micromechanics in the development of MEM devices with optical features, such as optical switches, optical cross-connects, and microbolometers.